High-pressure anneal process for integrated circuits

ABSTRACT

This invention embodies an improved process for annealing integrated circuits to repair fabrication-induced damage. An integrated circuit is annealed in a pressurized sealed chamber in which a forming gas comprising hydrogen is present. Pressurization of the chamber reduces the contribution made by the final anneal step to total thermal exposure by increasing the diffusion rate of the hydrogen into the materials from which the integrated circuit is fabricated. Ideally, the forming gas contains, in addition to hydrogen, at least one other gas such as nitrogen or argon that will not react with hydrogen and, thus, reduces the danger of explosion. However, the integrated circuit may be annealed in an ambiance containing only hydrogen gas that is maintained at a pressure greater than ambient atmospheric pressure.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of application Ser. No. 09/256,634,filed Feb. 24, 1999, now U.S. Pat. No. 6,352,946, issued Mar. 5, 2002,which is a continuation of application Ser. No. 08/589,852, filed Jan.22, 1996, now U.S. Pat. No. 5,895,274, issued Apr. 20, 1999.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to annealing processes used to repairprocess-induced damage in integrated circuits.

2. Description of Related Art

Integrated circuit devices are typically fabricated in mass on siliconwafers. During the fabrication process, a semiconductor wafer istransformed into a multitude of integrated circuits by subjecting it tonumerous ordered steps, which may include coating with photoresistresin, exposure of the photoresist to electromagnetic radiation using areticle affixed to a highly precise stepper device, development of thephotoresist to form a mask, oxidation, nitridization, silicidation, wetetching, plasma etching, chemical vapor deposition, plasma-enhancedchemical vapor deposition, sputter deposition, ion implants, andannealing steps for activating and driving implanted ions. A number ofthese steps create residual damage to the material being treated. Forexample, plasma etches typically leave dangling silicon bonds. In such acase, the silicon surface exposed to the etch comprises many siliconatoms with unfilled orbitals. Another example is the crystal damagewrought by ion implants. It is axiomatic that the larger the implantedion, the greater the crystal damage. Arsenic, a relatively large ion, isparticularly adept at damaging the silicon crystal structure whenimplanted. Plasma-enhanced chemical vapor deposition processes can alsocreate damage similar to that caused by plasma etches. In addition,silicon dioxide deposited using plasma-enhanced chemical vapordeposition processes tends to trap electrons. The charge buildupresulting from trapped electrons can shift threshold voltage values infield-effect transistors to the point where they will not fully shutoff. Unwanted current leakage through the transistors results.

Following fabrication, but before encapsulation or other packagingsteps, the wafers are annealed at temperatures of about 400° C. in aforming gas containing diatomic hydrogen for approximately 30 minutes inorder to repair the damage caused by the various process steps.Generally, the forming gas contains both diatomic hydrogen and diatomicnitrogen gases. The partial pressure of hydrogen within the forming gasis usually about 20 percent of the total pressure. At annealtemperatures, nitrogen functions as an inert gas, as it does not reactwith either hydrogen or the materials from which the circuits werefabricated within this temperature range. Although other inert gasessuch as helium, neon or argon may be used as components of the forminggas, nitrogen is used primarily for cost considerations. In addition,although forming gases having higher concentrations of hydrogen or evenpure hydrogen could be used for the final anneal ambiance, safetyconcerns dictate that hydrogen be diluted to a partial pressure ofaround 20 percent of the total pressure. At elevated temperatures,silicon crystals damaged by implanted ions tend to heal themselves.Although the healing process may be less than perfect, a significantreduction in transistor leakage is observed. During the anneal, thehydrogen gas molecules, on account of their small size, are able todiffuse throughout the circuit and react with any dangling bonds thatare present. Dangling bonds may be present on silicon atoms in substrateregions which have been plasma etched, in polycrystalline silicon layerswhich have been plasma etched, and in silicon atoms in silicon dioxidelayers which have been formed using plasma-enhanced chemical vapordeposition. The diffusion of hydrogen throughout the oxide layersdissipates trapped charges and enhances circuit performance.

During the fabrication process, an integrated circuit is subjected onnumerous occasions to elevated temperature. Generally, the elevatedtemperature is required to effect a necessary step in the fabricationprocess. For example, oxidation of silicon, implant activations, andchemical vapor deposition of silicon dioxides are generally performed attemperatures in excess of 500 degrees centigrade. Metallization stepsare also performed at high temperatures. Although a certain amount ofexposure to elevated temperatures is required both to activate implantedions and to cause them to diffuse within the implanted material, toomuch exposure to elevated temperature will effect too great an overlapand counterdoping of adjacent implants having opposite conductivitytypes and cause source/drain regions of field-effect transistors todiffuse too far into the channel regions. Outdiffusion of dopants intothe channel regions is irreversible and will result in transistorleakage. Greater outdiffusion will, at some point, completely destroythe functionality of the circuit. The exposure of integrated circuits toheat is analogous in two respects to the exposure of living organisms toionizing radiation. Not only is exposure cumulative, but at someexposure level, the organism will die. Each integrated circuit devicehas an optimum total thermal exposure limit that is generally referredto as the circuit's thermal budget. The budget is calculated by summingall exposures with regard to both time and temperature. Although time isa linear function, the diffusion rate does not increase in directproportion to the increase in temperature. Instead, the diffusion rateincreases geometrically with increasing temperature.

As device geometries are shrunk for new generations of integratedcircuits, thermal budgets must be lowered by a corresponding amount.Unless the process is modified to reflect these reduced thermal budgets,it will become increasingly difficult to stay within those budgets. Itis a given that final anneals in a hydrogen-containing ambiance forextended periods will become increasingly problematic in terms ofthermal budget considerations as device dimensions shrink.

Silicon nitride films are used extensively as moisture barriers inintegrated circuits. Silicon nitride films are also nearly impermeableto diatomic hydrogen molecules at standard temperature and pressure.This has not posed a problem until fairly recently, as the siliconnitride film is deposited as the final layer in the fabrication process.The hydrogen anneal step is performed prior to depositing the finalsilicon nitride film. However, silicon nitride films are also being usedwith increasing frequency for sidewall spacers and capping layers onfield-effect transistor gates when self-aligned contact etches arerequired for sub-half-micron geometries. These silicon nitride gatestructures must be fabricated long before the hydrogen anneal step. Thepresence of these silicon nitride structures greatly hampers thediffusion of hydrogen molecules into silicon dioxide layers associatedwith the transistor gates.

Therefore, a new final thermal anneal process is needed that is morecompatible with the limited thermal budgets and the silicon nitride gatestructures associated with the new generations of integrated circuits.

SUMMARY OF THE INVENTION

This invention embodies an improved process for annealing integratedcircuits to repair fabrication-induced damage. An integrated circuit isannealed in a pressurized, sealed chamber in which a forming gascontaining hydrogen is present. Pressurization of the chamber reducesthe contribution made by this final anneal step to total thermalexposure by increasing the diffusion rate of the hydrogen into thematerials from which the integrated circuit is fabricated. Ideally, theforming gas contains, in addition to hydrogen, at least one other gassuch as nitrogen or argon that will not react with hydrogen and, thus,reduces the danger of explosion. However, the integrated circuit may beannealed in an ambiance containing only hydrogen gas that is maintainedat a pressure greater than the prevailing ambient atmospheric pressure.Typical anneal temperatures are within a range of 300 to 500° C. forcircuits having aluminum metallization. Higher upper temperature limitsand shorter anneal times may be used for circuits employingmetallization materials with higher melting points than that ofaluminum. Although the efficiency of anneal operations improves byincreasing the annealing pressure above one atmosphere, optimumannealing pressures are deemed to be in the 10 to 25 atmosphere range.

BRIEF DESCRIPTION OF THE DRAWING

The sole FIGURE illustrates the process of the present invention.

PREFERRED EMBODIMENT OF THE INVENTION

The improved final anneal process, which takes place before theintegrated circuit devices are encapsulated, utilizes forming gas underhigh pressure to increase the diffusion rate of diatomic hydrogen withinthe materials from which the integrated circuits are manufactured. Byperforming the anneal under pressure and increasing the diffusion rateof diatomic hydrogen, the temperature of the duration or both thetemperature and duration of the anneal process may be reduced.Furthermore, by increasing pressure, anneal operations which werepreviously impractical due to impermeability of certain materials suchas silicon nitride become workable.

The improved final anneal takes place in a sealable anneal chamber 100in which a forming gas comprising hydrogen is present. In a preferredembodiment of the process, the forming gas contains both diatomichydrogen and diatomic nitrogen gases. Due to safety considerations, theoptimum partial pressure of hydrogen within the forming gas is about. 20percent of the total pressure. If the safety concerns are mitigable,greater partial pressures of hydrogen up to 100 percent of the totalpressure may be employed. In addition, the forming gas may comprise oneor more of other inert gases such as helium, neon and argon. The forminggas within the anneal chamber 100 is pressurized above ambientatmospheric pressure. Although equipment limitations will restrictmaximum pressures, process equipment that will handle pressures up to 10atmospheres is generally available. It is believed that even greaterpressures up to 25 atmospheres will further increase the diffusion rateof hydrogen within the materials from which the integrated circuits arefabricated and enable the use of lower anneal temperatures and/orshorter anneal periods. Additionally, it will make practical thehydrogen anneal of circuits having silicon nitride structuressurrounding gate structures. In order to reduce the contribution made bythis improved final anneal step to total thermal exposure, either theanneal temperature or the anneal duration is reduced. Alternatively,both the anneal temperature and the anneal duration can be reduced.Typical anneal temperatures are within a range of 300 to 500° C. forcircuits having aluminum metallization, with the optimum annealtemperature being about 400° C. Higher upper temperature limits withcorrespondingly shorter anneal times may be used for circuits employingmetallization materials with higher melting points than that ofaluminum. Typically, the anneal temperature is no greater than 80percent of the melting point of the metal or metal alloy utilized forthe metallization.

Although several embodiments of the improved anneal process aredisclosed herein, it will be obvious to those having ordinary skill inthe art of integrated circuit manufacture that changes and modificationsmay be made thereto without departing from the scope and the spirit ofthe invention as hereinafter claimed.

What is claimed is:
 1. A processing method for a workpiece ofsemiconductor material, said workpiece having at least one transistorgate structure having at least one first film of silicon nitride andhaving a second silicon nitride film deposited as a layer over at leasta portion of said workpiece, comprising: placing said workpiece in aregion having an ambient pressure of a gas, said workpiece having atleast one trransisitor gate structure having at least one first film ofsilicon nitride and having a second silicon nitride film deposited as alayer over at least a portion of said workpiece; providing a forming gasin said region; and annealing said workpiece within said region in saidforming gas, a pressure of said forming gas being greater than saidambient pressure of said gas in said region, said workpiece having atleast one transistor gate structure having at least one first film ofsilicon nitride and having a second silicon nitride film deposited as alayer over at least a portion of said workpiece.
 2. The method in claim1, wherein said annealing said workpiece comprises annealing saidworkpiece in said forming gas at a pressure greater than one atmosphere.3. The method in claim 2, wherein said annealing said workpiececomprises annealing said workpiece in said forming gas at a pressureranging from about 10 atmospheres to about 25 atmospheres.
 4. Aprocessing method for treating a workpiece of semiconductor material,said workpiece having an integrated circuit having at least onetransistor gate structure having a first film of silicon nitride as atleast one side wall spacer and having a capping layer on a portionthereof and having a silicon nitride film deposited as a final layerover a portion of said workpiece, comprising: providing a chamber in anenvironment that surrounds said chamber; placing said integrated circuitin said chamber, said integrated circuit having at least one transistorgate structure having a first film of silicon nitride as at least oneside wall spacer and having a capping layer on a portion thereof andhaving a silicon nitride film deposited as a final layer over a portionof said integrated circuit; introducing into said chamber a generallynon-oxidizing atmosphere comprising hydrogen; and generating a firstpressure inside said chamber, said first pressure being greater than asecond pressure of said environment that surrounds said chamber.
 5. Themethod in claim 4, wherein said generating a first pressure comprisesgenerating a first pressure greater than a general atmospheric pressure.